Vacuum Evaporation

Metal film deposition using vacuum evaporation is long proven technology. IMAT provides metal coating services on 100mm, 150mm, 200mm, 300mm, and 450mm wafers. Metals available for coating are: Pt, Ru, Pd, Au, Ag, Co, Ti, Cu, Al, Ta, and Ni with thickness ranging from 10nm to 2000nm with a +/- 7.5% uniformity or better. Vacuum evaporation is charged by the batch. For small quantity orders, we have some metal deposited wafers in our inventory. If you are interested in any of these, even one wafer, please contact us.